[IEEE 1993 IEEE International SOI Conference - Palm Springs, CA, USA (5-7 Oct. 1993)] Proceedings of 1993 IEEE International SOI Conference - Independent control of wafer temperature and beam current on SIMOX material quality

Allen, L.P.; Cordts, B.; Krull, W.A.; Yap, J.H.; Maung, T.; Chung, J. . (1993). [IEEE 1993 IEEE International SOI Conference - Palm Springs, CA, USA (5-7 Oct. 1993)] Proceedings of 1993 IEEE International SOI Conference - Independent control of wafer temperature and beam current on SIMOX material quality. , (), 18–19. doi:10.1109/soi.1993.344609

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