Low-temperature Crystallization and Paraelectric-ferroelectric Phase Transformation in Nanoscale ZrO <sub/>2</sub> Thin Films Induced by Atomic Layer Plasma Treatment

Yi, Sheng-Han; Huang, Kuei-Wen; Lin, Hsin-Chih; Chen, Miin-Jang . (2020). Low-temperature Crystallization and Paraelectric-ferroelectric Phase Transformation in Nanoscale ZrO <sub/>2</sub> Thin Films Induced by Atomic Layer Plasma Treatment. Journal of Materials Chemistry C, (), 10.1039.C9TC04801D–. doi:10.1039/c9tc04801d

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